Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job

Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job

A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stor...

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Hauptverfasser: You, James, Jang, Shen-Jr, Sun, King-Chuan
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Sprache:eng
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creator You, James
Jang, Shen-Jr
Sun, King-Chuan
description A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.
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A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.</abstract><oa>free_for_read</oa></addata></record>
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title Job queue management system and method thereof, including clustering wafer lots processed by common recipe into group, and creating process job and control job
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