Process and apparatus for producing powders of metal compound containing oxygen, and the powders produced by the process

A process for producing powders of metal compound containing oxygen including the steps of: feeding at least one material selected from a liquid material and a solution material obtained by dissolving solid ingredient in organic solvent via a liquid flow controller into a vaporizer; vaporizing the m...

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Bibliographische Detailangaben

Hauptverfasser:	Takamatsu, Yukichi, Kiriyama, Koji, Asano, Akira, Ishii, Takafumi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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