Thin film transistor tester and corresponding test method

To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A tester is provided to test a TFT array substr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Imura, Kenichi, Nakano, Daiju, Sakaguchi, Yoshitami
Format: Patent
Sprache:eng
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