Contactless system and method for detecting defective points on a chargeable surface

A method for detecting charge defect spots (CDSs) on a chargeable surface is provided, including charging the chargeable surface to receive and hold a first voltage charge, spacing a surface of a scanner probe a distance from the chargeable surface, the scanner probe having a diameter, and biasing t...

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Bibliographische Detailangaben

Hauptverfasser:	Junginger, Johann E, Popovic, Zoran D, Jeyadev, Surendar
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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