Ion beam neutral detection

An ion beam neutral detector system, an ion implanter system including the detector system and a method of detecting ion beam neutrals that ensures an ion implant is meeting contamination requirements are disclosed. The detector includes an energy contamination monitor positioned with in an ion impl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Renau, Anthony, Olson, Joseph C, Hermanson, Eric, Angel, Gordon C
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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