Apparatus and method of dispensing photosensitive solution in semiconductor device fabrication equipment

Apparatus and method of dispensing photosensitive solution in semiconductor device fabrication equipment

A method of and apparatus for dispensing photosensitive solution substantially reduces the amount of air bubbles in the photosensitive solution during the dispensing operation. The photosensitive solution dispensing apparatus includes at least one supply vessel that contains the solution, a respecti...

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1. Verfasser: Jang, Sung-Kun
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creator Jang, Sung-Kun
description A method of and apparatus for dispensing photosensitive solution substantially reduces the amount of air bubbles in the photosensitive solution during the dispensing operation. The photosensitive solution dispensing apparatus includes at least one supply vessel that contains the solution, a respective buffer tank that buffers the solution supplied from each supply vessel, a filter unit for filtering the solution, a pump for pumping the solution pumped from the buffer tank to the filter unit, a dispensing nozzle connected to the filter unit, and a dedicated bubble removal filter that is interposed between the buffer tank and the pump. The bubble removal filter is configured to remove air bubbles from the solution before the solution flows into the pump and is dispensed through the nozzle.
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The photosensitive solution dispensing apparatus includes at least one supply vessel that contains the solution, a respective buffer tank that buffers the solution supplied from each supply vessel, a filter unit for filtering the solution, a pump for pumping the solution pumped from the buffer tank to the filter unit, a dispensing nozzle connected to the filter unit, and a dedicated bubble removal filter that is interposed between the buffer tank and the pump. The bubble removal filter is configured to remove air bubbles from the solution before the solution flows into the pump and is dispensed through the nozzle.</abstract><oa>free_for_read</oa></addata></record>
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title Apparatus and method of dispensing photosensitive solution in semiconductor device fabrication equipment
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