Fingerprint detection device and method of its manufacture, and apparatus for forming a protective film

A fingerprint detection device has a fingerprint sensor chip and a diamond-like carbon (DLC) film covering the outermost surface of the sensor chip. The DLC film provides sufficient strength and enhanced electrostatic discharge withstand voltage to the fingerprint sensor chip. Thus, the DLC film pro...

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Hauptverfasser:	Miyai, Seiichi, Oka, Shuichi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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