Heterostructure resistor and method of forming the same

Heterostructure resistor and method of forming the same

A heterostructure resistor comprises a doped region formed in a portion of a semiconductor substrate, the substrate comprising a first semiconductor material having a first natural lattice constant. The doped region comprises a semiconductor layer overlying the semiconductor substrate. The semicondu...

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Hauptverfasser: Yeo, Yee-Chia, Lee, Wen-Chin, Ko, Chih-Hsin, Ge, Chung-Hu, Lin, Chun-Chieh, Hu, Chenming
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Sprache:eng
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creator Yeo, Yee-Chia
Lee, Wen-Chin
Ko, Chih-Hsin
Ge, Chung-Hu
Lin, Chun-Chieh
Hu, Chenming
description A heterostructure resistor comprises a doped region formed in a portion of a semiconductor substrate, the substrate comprising a first semiconductor material having a first natural lattice constant. The doped region comprises a semiconductor layer overlying the semiconductor substrate. The semiconductor layer comprises a second semiconductor material with a second natural lattice constant.
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title Heterostructure resistor and method of forming the same
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