Apparatuses and methods for resistively heating a thermal processing system

A resistive heater having a doped ceramic heating element embedded either partially or completely within a matrix of undoped ceramic material. The ceramic may be silicon carbide, and the dopant may be nitrogen. Many of the advantages of the present heater stern from the fact that the materials used...

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Bibliographische Detailangaben

Hauptverfasser:	Johnsgard, Kristian E, Messineo, Daniel L, Sallows, David E
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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