TDDB test pattern and method for testing TDDB of MOS capacitor dielectric
A Time Dependent Dielectric Breakdown (TDDB) test pattern circuit, which can reduce testing time and statistically improve a precision of measurement as well as a method for testing the test pattern circuit are discussed. Typically, a test pattern circuit includes in plurality of unit test patterns....
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| Format: | Patent |
| Sprache: | eng |
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