Depth of field enhancement for optical comparator

An optical device inspection system and method employing a narrow aperture on a magnifying objective lens in order to reduce the circle of confusion and increase the depth of field. The smaller aperture resulting in an increase in depth of field allows for simultaneous focus for all portions of obje...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Bergendahl, Marc, Lewison, David, Puffer, Jr, Raymond H
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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