Gravity safety door for an apparatus for manufacturing or inspecting semiconductors

An apparatus for manufacturing or inspecting semiconductors comprising a main body, an opening arranged in the main body, and a safety door. The safety door includes a first door element for covering a first portion of the opening and a second door element for covering a second portion of the openin...

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Bibliographische Detailangaben

Hauptverfasser:	Manpuku, Yasuhiro, Hiranuma, Kazunori, Takashina, Mamoru
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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