Mask identification database server

The physical movement of reticles and solder bump masks within a wafer processing plant are continually tracked and documented in a historical database for the useful life of the reticles or masks. In an example embodiment of the mask tracking method, the method includes moving the masks from one lo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shirley, Russel, Conboy, Michael R, Bowser, Jr, Horace Paul
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!