Method for dechucking a substrate

A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift...

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Bibliographische Detailangaben

Hauptverfasser:	Shang, Quanyuan, Harshbarger, William R, Greene, Robert L, Shimizu, Ichiro
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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