Method of manufacturing a sensor element having integrated reference pressure

A pressure sensor includes a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated...

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Bibliographische Detailangaben

1. Verfasser:	Jonsson, Staffan
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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