Flexible hybrid defect classification for semiconductor manufacturing
Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules in...
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| creator | Huet, Patrick Shanbhag, Maruti Bhagwat, Sandeep Kowalski, Michal Kini, Vivekanand Randall, David McCauley, Sharon Huang, Tong Zhang, Jianxin Wu, Kenong Gao, Lisheng Tribble, Ariel Kulkarni, Ashok Campochiaro, Cecelia Anne |
| description | Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data. |
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| title | Flexible hybrid defect classification for semiconductor manufacturing |
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