Capacitive microsensor
A capacitive microsensor formed on a wafer, including a conductive detection area arranged on a first surface or front surface of the wafer; a conductive via crossing the wafer and emerging on said area; and a structure to ensure contact with said via on the second surface or rear surface of the waf...
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| creator | Pezzani, Robert |
| description | A capacitive microsensor formed on a wafer, including a conductive detection area arranged on a first surface or front surface of the wafer; a conductive via crossing the wafer and emerging on said area; and a structure to ensure contact with said via on the second surface or rear surface of the wafer. |
| format | Patent |
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| language | eng |
| recordid | cdi_uspatents_grants_07130455 |
| source | USPTO Issued Patents |
| title | Capacitive microsensor |
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