Low thermal expansion ceramic and member for exposure system
−6A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected fr...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Yoshitomi, Yasuki Arahori, Tadahisa |
| description | −6A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10/° C. or less. |
| format | Patent |
| fullrecord | <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_07112549</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>07112549</sourcerecordid><originalsourceid>FETCH-uspatents_grants_071125493</originalsourceid><addsrcrecordid>eNrjZLDxyS9XKMlILcpNzFFIrShIzCvOzM9TSE4tSszNTFZIzEtRyE3NTUotUkjLLwIpyC8uLUpVKK4sLknN5WFgTUvMKU7lhdLcDApuriHOHrqlxQWJJal5JcXx6UWJIMrA3NDQyNTE0pgIJQDGCzDl</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Low thermal expansion ceramic and member for exposure system</title><source>USPTO Issued Patents</source><creator>Yoshitomi, Yasuki ; Arahori, Tadahisa</creator><creatorcontrib>Yoshitomi, Yasuki ; Arahori, Tadahisa ; Sumitomo Metal Industries, Ltd</creatorcontrib><description>−6A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10/° C. or less.</description><language>eng</language><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7112549$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,780,802,885,64039</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7112549$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Yoshitomi, Yasuki</creatorcontrib><creatorcontrib>Arahori, Tadahisa</creatorcontrib><creatorcontrib>Sumitomo Metal Industries, Ltd</creatorcontrib><title>Low thermal expansion ceramic and member for exposure system</title><description>−6A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10/° C. or less.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNrjZLDxyS9XKMlILcpNzFFIrShIzCvOzM9TSE4tSszNTFZIzEtRyE3NTUotUkjLLwIpyC8uLUpVKK4sLknN5WFgTUvMKU7lhdLcDApuriHOHrqlxQWJJal5JcXx6UWJIMrA3NDQyNTE0pgIJQDGCzDl</recordid><startdate>20060926</startdate><enddate>20060926</enddate><creator>Yoshitomi, Yasuki</creator><creator>Arahori, Tadahisa</creator><scope>EFH</scope></search><sort><creationdate>20060926</creationdate><title>Low thermal expansion ceramic and member for exposure system</title><author>Yoshitomi, Yasuki ; Arahori, Tadahisa</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_071125493</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Yoshitomi, Yasuki</creatorcontrib><creatorcontrib>Arahori, Tadahisa</creatorcontrib><creatorcontrib>Sumitomo Metal Industries, Ltd</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yoshitomi, Yasuki</au><au>Arahori, Tadahisa</au><aucorp>Sumitomo Metal Industries, Ltd</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Low thermal expansion ceramic and member for exposure system</title><date>2006-09-26</date><risdate>2006</risdate><abstract>−6A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group IVa elements, group Va elements and group VIa elements, and boron carbide. The ceramic has a porosity of 0.5% or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5×10/° C. or less.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_uspatents_grants_07112549 |
| source | USPTO Issued Patents |
| title | Low thermal expansion ceramic and member for exposure system |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T08%3A53%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Yoshitomi,%20Yasuki&rft.aucorp=Sumitomo%20Metal%20Industries,%20Ltd&rft.date=2006-09-26&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E07112549%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |