Method and system for non-contact measurement of microwave capacitance of miniature structures of integrated circuits

A method and system for non-contact measurements of microwave capacitance of miniature structures patterned on wafers used for production of modern integrated circuits. A near-field balanced two-conductor probe is brought into close proximity to a test key built on a wafer of interest and replicatin...

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Bibliographische Detailangaben

Hauptverfasser:	Talanov, Vladimir V, Schwartz, Andrew R
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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