Flexible polishing fluid delivery system

A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a pl...

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Bibliographische Detailangaben

Hauptverfasser:	Vereen, Lidia, Skarpelos, Peter N, Downum, Brian J, Williams, Patrick, Ko, Terry Kin-Ting, Lee, Christopher Heung-Gyun, Reynolds, Kenneth Reese, Hearne, John, Hachnochi, Daniel
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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