Flexible polishing fluid delivery system

A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a pl...

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Hauptverfasser: Vereen, Lidia, Skarpelos, Peter N, Downum, Brian J, Williams, Patrick, Ko, Terry Kin-Ting, Lee, Christopher Heung-Gyun, Reynolds, Kenneth Reese, Hearne, John, Hachnochi, Daniel
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Sprache:eng
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creator Vereen, Lidia
Skarpelos, Peter N
Downum, Brian J
Williams, Patrick
Ko, Terry Kin-Ting
Lee, Christopher Heung-Gyun
Reynolds, Kenneth Reese
Hearne, John
Hachnochi, Daniel
description A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.
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title Flexible polishing fluid delivery system
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