Apparatus and method for testing electrode structure for thin display device using FET function

Apparatus and method for testing electrode structure for thin display device using FET function

In a method of testing an electrode structure in which a plurality of electrodes are arranged in a matrix, a test unit is positioned at a position of a target one of the plurality of electrodes apart from the target electrode by a preset distance. The test unit has a MISFET having a source, a gate a...

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Hauptverfasser: Murakawa, Shinichi, Doi, Takashi, Egashira, Yoshio, Ueda, Shigeo
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Sprache:eng
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creator Murakawa, Shinichi
Doi, Takashi
Egashira, Yoshio
Ueda, Shigeo
description In a method of testing an electrode structure in which a plurality of electrodes are arranged in a matrix, a test unit is positioned at a position of a target one of the plurality of electrodes apart from the target electrode by a preset distance. The test unit has a MISFET having a source, a gate and a drain. Then, a first voltage is applied to the target electrode such that a gate voltage is induced at the gate by electrostatic induction. Also, a second voltage is applied to at least one of the source and the drain such that current flows between the source and the drain based on the gate voltage. Then, a value of the current is examined to determine an electrical connection state of the target electrode.
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title Apparatus and method for testing electrode structure for thin display device using FET function
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