SCR-ESD structures with shallow trench isolation

A novel device structure and process are described for an SCR ESD protection device used with shallow trench isolation structures. The invention incorporates an SCR device with all SCR elements essentially contained within the same active area without STI elements being interposed between the device...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Yu, Ta-Lee
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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