Method of connecting a multiplicity of optical elements to a basic body

In a method of connecting a multiplicity of optical elements to a basic body, in particular for producing a faceted mirror, for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements are positioned on the basic body and subsequently connected to one ano...

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Bibliographische Detailangaben
Hauptverfasser: Melzer, Frank, Bingel, Ulrich
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In a method of connecting a multiplicity of optical elements to a basic body, in particular for producing a faceted mirror, for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements are positioned on the basic body and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure and the optical elements are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure as the basic body.