Sensor package and method

A sensor package and method are described. The sensor package includes an enclosure, a diaphragm coupled to the enclosure. The diaphragm is configured to receive vibrations from an ambient environment. Further, the sensor package includes a pressure sensing element disposed inside the enclosure, and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Subramanian, Kanakasabapathi, Buckley, Jr, Donald Joseph, Rubinsztajn, Slawomir, Gowda, Arun Virupaksha, Weaver, Jr, Stanton Earl, Craddock, Russell William, Haitko, Deborah Ann
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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