Sensor package and method

Sensor package and method

A sensor package and method are described. The sensor package includes an enclosure, a diaphragm coupled to the enclosure. The diaphragm is configured to receive vibrations from an ambient environment. Further, the sensor package includes a pressure sensing element disposed inside the enclosure, and...

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Hauptverfasser: Subramanian, Kanakasabapathi, Buckley, Jr, Donald Joseph, Rubinsztajn, Slawomir, Gowda, Arun Virupaksha, Weaver, Jr, Stanton Earl, Craddock, Russell William, Haitko, Deborah Ann
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Sprache:eng
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creator Subramanian, Kanakasabapathi
Buckley, Jr, Donald Joseph
Rubinsztajn, Slawomir
Gowda, Arun Virupaksha
Weaver, Jr, Stanton Earl
Craddock, Russell William
Haitko, Deborah Ann
description A sensor package and method are described. The sensor package includes an enclosure, a diaphragm coupled to the enclosure. The diaphragm is configured to receive vibrations from an ambient environment. Further, the sensor package includes a pressure sensing element disposed inside the enclosure, and a pressure transfer medium disposed inside the enclosure and proximate the pressure sensing element, where the pressure transfer medium includes a fluid, and a plurality of filler particles suspended in the fluid. The filler particles serve to reduce a coefficient of thermal expansion of the pressure transfer medium.
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title Sensor package and method
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