Optical analysis of integrated circuits

Optical analysis of integrated circuits

The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated ci...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Birdsley, Jeffrey D, Bruce, Michael R, Davis, Brennan V, Ring, Rosalinda M, Stone, Daniel L
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Birdsley, Jeffrey D
Bruce, Michael R
Davis, Brennan V
Ring, Rosalinda M
Stone, Daniel L
description The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.
format Patent
fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_07019511</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>07019511</sourcerecordid><originalsourceid>FETCH-uspatents_grants_070195113</originalsourceid><addsrcrecordid>eNrjZFD3LyjJTE7MUUjMS8ypLM4sVshPU8jMK0lNL0osSU1RSM4sSi7NLCnmYWBNS8wpTuWF0twMCm6uIc4euqXFBUCFeSXF8UAdIMrA3MDQ0tTQ0JgIJQCQJSj-</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Optical analysis of integrated circuits</title><source>USPTO Issued Patents</source><creator>Birdsley, Jeffrey D ; Bruce, Michael R ; Davis, Brennan V ; Ring, Rosalinda M ; Stone, Daniel L</creator><creatorcontrib>Birdsley, Jeffrey D ; Bruce, Michael R ; Davis, Brennan V ; Ring, Rosalinda M ; Stone, Daniel L ; Advanced Micro Devices, Inc</creatorcontrib><description>The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.</description><language>eng</language><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7019511$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,776,798,881,64012</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7019511$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Birdsley, Jeffrey D</creatorcontrib><creatorcontrib>Bruce, Michael R</creatorcontrib><creatorcontrib>Davis, Brennan V</creatorcontrib><creatorcontrib>Ring, Rosalinda M</creatorcontrib><creatorcontrib>Stone, Daniel L</creatorcontrib><creatorcontrib>Advanced Micro Devices, Inc</creatorcontrib><title>Optical analysis of integrated circuits</title><description>The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNrjZFD3LyjJTE7MUUjMS8ypLM4sVshPU8jMK0lNL0osSU1RSM4sSi7NLCnmYWBNS8wpTuWF0twMCm6uIc4euqXFBUCFeSXF8UAdIMrA3MDQ0tTQ0JgIJQCQJSj-</recordid><startdate>20060328</startdate><enddate>20060328</enddate><creator>Birdsley, Jeffrey D</creator><creator>Bruce, Michael R</creator><creator>Davis, Brennan V</creator><creator>Ring, Rosalinda M</creator><creator>Stone, Daniel L</creator><scope>EFH</scope></search><sort><creationdate>20060328</creationdate><title>Optical analysis of integrated circuits</title><author>Birdsley, Jeffrey D ; Bruce, Michael R ; Davis, Brennan V ; Ring, Rosalinda M ; Stone, Daniel L</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_070195113</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Birdsley, Jeffrey D</creatorcontrib><creatorcontrib>Bruce, Michael R</creatorcontrib><creatorcontrib>Davis, Brennan V</creatorcontrib><creatorcontrib>Ring, Rosalinda M</creatorcontrib><creatorcontrib>Stone, Daniel L</creatorcontrib><creatorcontrib>Advanced Micro Devices, Inc</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Birdsley, Jeffrey D</au><au>Bruce, Michael R</au><au>Davis, Brennan V</au><au>Ring, Rosalinda M</au><au>Stone, Daniel L</au><aucorp>Advanced Micro Devices, Inc</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Optical analysis of integrated circuits</title><date>2006-03-28</date><risdate>2006</risdate><abstract>The invention is directed to a system and method for analyzing an integrated circuit having silicon on insulator (SOI) structure. According to one example embodiment of the present invention, an optical beam arrangement is adapted to direct a modulated beam at a selected portion of the integrated circuit. The beam is sufficiently modulated to inhibit optical beam intrusion on the structure and operation of the integrated circuit. A reflected optical waveform response is obtained from the SOI selected portion. The inhibition of optical beam intrusion enhances the ability to analyze integrated circuits using an optical beam, making possible the use of analysis methods that otherwise would be difficult or even impossible to use.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_grants_07019511
source USPTO Issued Patents
title Optical analysis of integrated circuits
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-08T08%3A39%3A00IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Birdsley,%20Jeffrey%20D&rft.aucorp=Advanced%20Micro%20Devices,%20Inc&rft.date=2006-03-28&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E07019511%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true