Hybrid gap measurement circuit

Hybrid gap measurement circuit

Systems and methods are disclosed for measuring a distance (or gap) between substrates of a hybrid semiconductor. The measurements may be made during a hybridization process to, for example, provide alignment feedback during the hybridization process. The measurements may also be made after the hybr...

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Hauptverfasser: Parrish, William J, Barton, Jeffrey B, Aziz, Naseem Y, Costello, Adrienne N
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Sprache:eng
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creator Parrish, William J
Barton, Jeffrey B
Aziz, Naseem Y
Costello, Adrienne N
description Systems and methods are disclosed for measuring a distance (or gap) between substrates of a hybrid semiconductor. The measurements may be made during a hybridization process to, for example, provide alignment feedback during the hybridization process. The measurements may also be made after the hybridization process to further calibrate the process or to provide information useful for further processing operations.
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title Hybrid gap measurement circuit
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