Molecular ruler for scaling down nanostructures

The present invention is a method and apparatus relating to manufacturing nanostructure patterns and components using molecular science. The method includes overlaying a multilayer organic molecule resist on at least a portion of a parent structure selectively deposited on a substrate, depositing a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Weiss, Paul S, Hatzor, Anat
Format: Patent
Sprache:eng
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