Method for inspecting defect and system therefor

Method for inspecting defect and system therefor

Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Mo...

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Hauptverfasser: Ninomiya, Takanori, Isogai, Seiji, Matsui, Shigeru, Kurosaki, Toshiei
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Sprache:eng
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creator Ninomiya, Takanori
Isogai, Seiji
Matsui, Shigeru
Kurosaki, Toshiei
description Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.
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title Method for inspecting defect and system therefor
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