Catadioptric reduction lens

A catadioptric projection lens configured for imaging a pattern arranged in an object plane onto an image plane while creating a single, real, intermediate image has a catadioptric imaging group having a concave mirror and a beam-deflector, and a dioptric imaging lens group that commences after the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Epple, Alexander, Beierl, Helmut
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!