Method and related system for semiconductor equipment early warning management

A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tai, Hung-En, Chen, Chien-Chung, Luo, Haw-Jyue, Wang, Sheng-Jen
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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