Wafer transport apparatus

Wafer transport apparatus

A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamb...

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Hauptverfasser: Kinnard, David William, Richardson, Daniel
Format: Patent
Sprache:eng
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creator Kinnard, David William
Richardson, Daniel
description A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
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title Wafer transport apparatus
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