Probe card and contactor of the same

Probe card and contactor of the same

A probe card used for measuring electrical characteristics of a semiconductor device such as an LSI chip and comprising a contactor mounting substrate on which a plurality of contactors are arranged, in which the contactor comprises an insertion part for mounting the contactor on the contactor mount...

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Hauptverfasser: Mori, Chikaomi, Satou, Katsuhiko
Format: Patent
Sprache:eng
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creator Mori, Chikaomi
Satou, Katsuhiko
description A probe card used for measuring electrical characteristics of a semiconductor device such as an LSI chip and comprising a contactor mounting substrate on which a plurality of contactors are arranged, in which the contactor comprises an insertion part for mounting the contactor on the contactor mounting substrate, a support part for supporting the insertion part and performing positioning in the height direction by contacting a surface of the contactor mounting substrate, an arm part extending from the support part, and a contact part arranged at a tip end of the arm part to come in contact with an electrode of an object to be tested, and the insertion part is detachably mounted on an electrode hole provided in the surface of the contactor mounting substrate and made to be conductive by a wiring pattern.
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title Probe card and contactor of the same
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