Method and apparatus for non-contact thickness measurement

The present invention provides a method and apparatus for use in measuring a thickness of a layer and/or variations in layer thickness for layers that are flat, curved or have curves. The apparatus comprises a light source to generate a light beam, a light beam detector to detect at least a portion...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Caton, Lindsey M, Sergoyan, Edward G
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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