Performing passive voltage contrast on a silicon on insulator semiconductor device
A method and type of device for performing passive voltage contrast on a silicon on insulator (SOI) device. A first portion of a substrate of the SOI device may be ground with a dimpler. A second portion of the substrate of the SOI device may be etched using tetramethylammonium hydroxide (TMAH). A t...
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| Sprache: | eng |
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