Apertured probes for localized measurements of a material's complex permittivity and fabrication method

Apertured probes for localized measurements of a material's complex permittivity and fabrication method

A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume...

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Hauptverfasser: Moreland, Robert L, Christen, Hans M, Talanov, Vladimir V, Schwartz, Andrew R
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Sprache:eng
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creator Moreland, Robert L
Christen, Hans M
Talanov, Vladimir V
Schwartz, Andrew R
description A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study. A method for manufacturing dielectric support member based probes includes anisotropically depositing a 50-100 Å thick underlayer of Cr, Ni, W or Ta onto the dielectric support member, anisotropically depositing conductive material onto the Cr, Ni, W or Ta underlayer, and removing the unwanted conductive material at the sides of the dielectric support member to electrically isolate the created conductive strips.
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title Apertured probes for localized measurements of a material's complex permittivity and fabrication method
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