Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof

42 662 4323262 The Mo or MoW composition layer has a low resistivity of less than 15 μΩcm and is etched to have a smooth taper angle using an Al alloy enchant or a Cr enchant, and the Mo or MoW layer is used for a wiring of a display or a semiconductor display along with an Al layer or a Cr layer. S...

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Hauptverfasser:	Jeong, Chang-Oh, Kim, Yang-Sun, Hur, Myung-Koo, Tak, Young-Jae, Hong, Mun-Pyo, Kim, Chi-Woo, Kim, Jang-Soo, You, Chun-Gi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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