Micromechanical structure, in particular for an acceleration sensor

A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kipp, Andreas, Goetz, Siegbert, Lutz, Markus
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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