Micromechanical structure, in particular for an acceleration sensor

Micromechanical structure, in particular for an acceleration sensor

A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position....

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Hauptverfasser: Kipp, Andreas, Goetz, Siegbert, Lutz, Markus
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creator Kipp, Andreas
Goetz, Siegbert
Lutz, Markus
description A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position. The centrifugal mass has an oblong convex form and is essentially rotationally symmetric in relation to the longitudinal axis. The centrifugal mass optionally has a widening at both longitudinal ends, to which the flexible spring device is attached.
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title Micromechanical structure, in particular for an acceleration sensor
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