Low-activation energy silicon-containing resist system

Inventive silsesquioxane polymers are provided, and resist compositions that contain such silsesquioxane polymers are provided in which at least a portion of the silsesquioxane polymer contains fluorinated moieties, and at least a portion of the silisesquioxane polymer contains pendant solubility in...

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Bibliographische Detailangaben

Hauptverfasser:	Huang, Wu-Song, Allen, Robert D, Angelopoulos, Marie, Kwong, Ranee W, Sooriyakumaran, Ratnam
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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