Electron microscope, method for operating the same, and computer-readable medium

An electron microscope comprises a specimen designating section for designating a characteristic of a specimen, a simplified image observation condition setting section for setting one image observation conditions out of a plurality of simplified image observation conditions, which were set previous...

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Bibliographische Detailangaben

Hauptverfasser:	Furukawa, Hiroshi, Hirata, Tomohiko
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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