Feature targeted inspection

A method of inspecting a subject integrated circuit. A set of historical integrated circuits is inspected to detect defects and produce historical data. Features of the historical integrated circuits that have an occurrence of defects that is greater than a given limit are designated as high risk fe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Madge, Robert
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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