Direct-patterned optical waveguides on amorphous silicon films

2 2 An optical waveguide structure is formed by embedding a core material within a medium of lower refractive index, i.e. the cladding. The optical index of refraction of amorphous silicon (a-Si) and polycrystalline silicon (p-Si), in the wavelength range between about 1.2 and about 1.6 micrometers,...

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Hauptverfasser:	Vernon, Steve, Bond, Tiziana C, Bond, Steven W, Pocha, Michael D, Hau-Riege, Stefan
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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