Method for implementing an efficient and economical cathode process

The present invention provides a method of fabricating a cathode requiring relatively few and somewhat simple steps. In one embodiment, a novel etchant gas chemistry dispenses with needing a second passivation layer. In one embodiment, a direct via is formed without a separate mask. In one embodimen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, Jueng-Gil, Bonn, Matthew A, Kemmotsu, Hidenori, Kikuchi, Kazuo
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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