Cylindrical magnetron target and spindle apparatus

A cylindrical magnetron target and spindle attachment apparatus for affixing a cylindrical magnetron target to a rotatable support spindle. The attachment apparatus includes a target and a spindle. The target defines a receiving portion. The spindle has a spindle plug. The spindle plug is disposed w...

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Bibliographische Detailangaben

1. Verfasser:	Crowley, Daniel T
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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