Method and apparatus for abatement of reaction products from a vacuum processing chamber

An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF energy to the coil. The coil creates...

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Hauptverfasser:	Shufflebotham, Paul Kevin, Barnes, Michael
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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