Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film

Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film

Large particles falling from the reaction chamber's walls during FSG deposition results in tungsten (W) defects and reduces process capability (Cp) yield. These particles are FSG particles because of the outermost seasoning layer particles. A method for reducing contaminants in a processing cha...

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Hauptverfasser: Yoo, Ming-Hwa, Lin, Shih-Chi, Cheng, Yi-Lung, Wu, Szu-An, Wang, Ying-Lang
Format: Patent
Sprache:eng
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Zusammenfassung:Large particles falling from the reaction chamber's walls during FSG deposition results in tungsten (W) defects and reduces process capability (Cp) yield. These particles are FSG particles because of the outermost seasoning layer particles. A method for reducing contaminants in a processing chamber having an inner wall by seasoning the walls. The method comprising the following steps. A first USG film is formed over the processing chamber inner wall. An FSG film is formed over the first USG film. A second USG film is formed over the FSG film. A nitrogen-containing film is formed over the second USG film wherein the first USG film, the FSG film, the second USG film and the nitrogen-containing film comprise a UFUN season film.