Molded end point detection window for chemical mechanical planarization

Molded end point detection window for chemical mechanical planarization

1. Field of the Invention An optical window structure for use in chemical mechanical planarization is provided. The optical window structure includes a polishing pad and an optical window opening in the polishing pad. The optical window structure also includes a molded optical window attached to an...

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Hauptverfasser: Xu, Cangshan, Wu, Patrick P. H, Pham, Xuyen
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Sprache:eng
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creator Xu, Cangshan
Wu, Patrick P. H
Pham, Xuyen
description 1. Field of the Invention An optical window structure for use in chemical mechanical planarization is provided. The optical window structure includes a polishing pad and an optical window opening in the polishing pad. The optical window structure also includes a molded optical window attached to an underside of the polishing pad, a molded portion of the optical window at least partially protruding into the optical window opening in the polishing pad.
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title Molded end point detection window for chemical mechanical planarization
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