Substrate independent superpolishing process and slurry

The present invention relates to data processing systems. More particularly, the present invention relates to the polishing of substrate materials for magnetic media. The present invention utilizes a combination of chemical and mechanical finishing processes to polish a disk substrate surface to nea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Den Hartog, Brent Ray, Fox, Dennis Leonard, Hagan, James Aloysius, Shen, John Chen, Viswanathan, Kannimangalam Venkatasubramanyam
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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